Used MARCH AP 1000 #9311918 for sale

MARCH AP 1000 is an asher, or etcher, made by MARCH Instruments. It is a stand-alone, bench top equipment designed to etch substrates, usually group III and group IV semiconductors, with high precision and accuracy. It is equipped with a single-piece quartz chamber, as well as a Programmable Logic Controlled (PLC), which allows for precise control over aspects such as temperature, pressure, and flow rate. The control system is highly customizable and programmable, allowing for complex etching processes. The unit employs an electron beam source, which enables a high degree of process control and can be used for a variety of specialized etch processes. MARCH AP1000 has the ability to process a wide range of substrates ranging from 1- to 6-inch thick substrates and is widely used in the semiconductor industry for various types of etch processes, such as deep reactive ion etching (DRIE), ion milling, and plasma etching, as well as for creating electro-optical products. AP-1000 is designed to provide reliable and repeatable etch processes, making it a popular choice in the semiconductor production process. MARCH AP-1000 can be equipped with a variety of process gases, including Argon, Oxygen, Xenon, and Nitrogen. An optional mass flow controller can also be used to monitor and adjust flow rate and pressure. Additionally, an array of reservoir options are available, depending on the process. With its automated cassette-to-cassette substrate handling machine and its patented automatic flushing tool, AP 1000 has proven to be a reliable workhorse in the semiconductor industry.