Used MARCH CS 1701 #9149586 for sale
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ID: 9149586
Wafer Size: 4"-6"
Reactive Ion Etch (RIE) system, 4"-6"
Automatic tuning
Mass flows:
100 Sccm
250 Sccm
N2 Purge
(2) Clam shells
Power: 0-600 Watts power (AE RF Generator RFX-600).
MARCH CS 1701 is an etcher and asher designed for compact and efficient operation that manufacturers can integrate within their production line. It is a fully automated etcher and ash solution that is compatible with the most common process chemistries which makes it well suited for production environments. The etcher and asher come with a built-in computer control equipment that is highly sophisticated and simple to operate. It takes only minutes to setup and calibrate for any of the desired process chemistries, reducing the risk of faulty etching or squandering precious resources. The system has a user-friendly design with an LCD touch screen display that allows users to control, monitor and fine-tune the process for maximum efficiency and reliability. To ensure safety the etcher and asher are designed with several safety features, such as fail-safe temperature control, pressure control, and gas monitoring systems. Additionally, the etcher and asher work with several types of gasses allowing for better control of the overall process. It has a powerful ventilation unit, an emergency shut-off machine, and a HEPA filtration tool which ensures proper removal of any gasses or particles. MARCH CS-1701 has a sleek and modern design which has been carefully designed to be easily integrated into any production line. The highly efficient and reliable operation also provides precision etching and ashing over a wide range of substrates. Its advanced design allows it to deal with both organic and inorganic materials of almost any thickness without any warping or crushing. The etcher and asher offers high production throughput speeds making it ideal for high-volume operations where time and speed are of the essence. Its easy-to-use features and quick setup make it great for short production runs or quick prototyping. Plus, it is cost-effective, so manufacturers can save money while still getting great results.
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