Used MARCH CS 1701 #9268939 for sale

MARCH CS 1701 is a fully automatic etcher / asher designed to support connected systems that require high precision microfabrication. Its features include a wide process range from 0.5 to 10 microns for etching and ashing processes while its precision and repeatability ensure maximum material quality. The equipment can be used for applications such as the fabrication of semiconductor devices, MEMS, biochips, printed circuit boards, and display panels. The Etcher / Asher features a modular design that allows for improved productivity and flexibility. It is capable of supporting two process modes: batch and single-wafer. Batch processing is used when large volumes of workpieces must be processed, while single-wafer processing presents a great advantage for small batches or for high precision processes. The Etcher / Asher can support a variety of process gases including chlorine, oxygen, sulfur hexafluoride, nitrogen, helium, and hydrogen. It also supports different substrate materials including aluminum, copper, silicon, and gallium arsenide. The precise control of process conditions, including pressure, temperature, and concentration, allows for the optimization of the process parameters for the best results. In addition to the etching and ashing process, the system also features real-time monitoring capabilities for improved process monitoring and data collection. It can measure and communicate the pressure, temperature, and flow rate of each chamber, as well as the electrolyte level and current in the etch tanks. These can also be displayed via a touchscreen interface where the user can access additional information such as the total processing time, elapsed time, and instantaneous pressure, temperature, and flow rate of the each chamber. The unit is also equipped with an array of safety features to ensure safe operation of the process. These include pressure sensors and interlocks in each chamber, as well as temperature and flow sensors with alarm notification. The chamber's door can also be accessed remotely to ensure that all personnel are out of the area when the chamber door is opened. Additionally, leak detection technology monitors the chamber's seals to protect personnel and the product from hazardous leaks. The machine can be integrated into a wide range of automation systems to ensure overall efficiency in process control. This allows for greater flexibility and the capability to streamline the entire process. The tool also has high-performance motion control capabilities for precise movements and accurate position control. It is designed for easy setup and operation to minimize downtime and improve efficiency.