Used MARCH FlexTRAK-SH #293629358 for sale

MARCH FlexTRAK-SH is a fully-featured, low-cost etcher / asher equipment manufactured by MARCH, Inc. The system is ideal for rapid prototyping, rapid device fabrication and R&D projects. It features 360-degree, multiple wafer loading and unloading capability, with an EST (Easy Spin-Transfer) Vacuum Chuck guaranteeing precise and secure wafer positioning. The unit is designed for safe and reliable operation, featuring all components enclosed in a Common Air-Flow (CAF) chamber as well as an innovative protection machine that prevents any chemical-based damage to the sensitive device structures. This tool also provides an efficient heat flux profile, since all components have been designed to optimize the path of the reacting chemicals. The intuitive user interface enables the user to control all asset parameters, while the precise motion control and the complete ESP (Pattern) library of pre-programmed recipes allow for a fast, precise and repeatable wafer processing. FlexTRAK-SH model is also environmentally friendly, eliminating any environmental concerns related to operating a chemical processing equipment. This is due to the completely sealed, fume-free enhanced evacuation system and the safe and clean operation provided. Finally, for maximum process efficiency, MARCH FlexTRAK-SH unit features a fully integrated Centralized Controller that provides a unified automation platform for controlling all machine parameters, allowing for an easy integration into existing tool-specific recipe libraries, as well as supporting remote operation and data analysis.