Used MARCH FlexTRAK-SH #9232254 for sale

MARCH FlexTRAK-SH is an etcher / asher designed for microfabrication laboratories, with a wide range of applications for its users. The equipment features a high level of accuracy, with automated programmable Recipe control as well as standard rotation and wafer trajectories. It is also fully integrated with MARCH 'Trak-Tool.' This allows for wafer handling and etching recipes development without any programming. The system is also low maintenance and is easy to operate. FlexTRAK-SH features the 'Helios' chamber design which includes two sources of RF inductively coupled plasma. This provides for the etching of both PECVD and PE-CVD processes such as LPCVD, LPCVD OIS, OLED, and ECR. This also gives users the ability to achieve very high plasma density and uniformity, even with small wafer sizes. The 'Helios' chamber also features a z-flight scan line option, for uniform etching of large wafers with large aspect ratios. MARCH FlexTRAK-SH also provides variable etch rates, and has the ability to etch materials including oxide, nitride, polysilicon, metals, and metal alloys. It is also capable of etching wafers up to 12 inches in diameter. The unit is equipped with out of envelope security systems to ensure user safety, as well as to prevent chemical leakage. The etcher/asher also has a range of process sensors that detect pressure, temperature, and O2 levels, which provide for the accurate control of the etch process. FlexTRAK-SH is a powerful and versatile tool that is easy to operate, and suitable for a wide range of laboratory applications. It provides a high level of precision and accuracy with customizable Recipes and software tools, to ensure reliable and repeatable results. The performance of the machine is further enhanced by its advanced 'Helios' chamber design, which ensures an even and uniform etch rate production. The etcher / asher also has a range of safety measures in place to ensure the safety of its users.