Used MARCH FlexTRAK #9101089 for sale

MARCH FlexTRAK is a versatile RF asher/ etcher equipment designed for precision, cost-effectiveness, and efficiency. It combines the best aspects of the most modern etching technology with the flexibility of a user-friendly platform. The system is extremely versatile and is able to handle advanced fabrication processes. The field is outlined by three concentric RF rings which separate the gas environment into three layers that can be efficiently adjusted to allow the etch process to occur at highly precise temperatures, pressures, and flow conditions. The design allows near 100% utilization of a single recipe to achieve complex patterns. At the heart of the unit is a rugged, high-powered RF module, capable of delivering up to 500 watts at frequencies ranging from 400 kilohertz to 4 megahertz. The precision of this is two orders of accuracy better than similar modules. The high frequencies allow for faster etching times and higher yields. FlexTRAK also has an integrated programmable controller which provides an interactive interface between the user and the machine. This allows for complete control of the etch process, including the process gases, temperatures, pressures, and chamber door actions. The controller is designed to easily configure and run complex recipes, with the flexibility to debug and modify the process parameters. In addition, the tool features active cooling and a robust control asset to ensure uniform etch depth over the entire sample. This makes the model highly efficient and provides precise control over etch depth and uniformity. The equipment is humidity controlled to ensure that the dielectric properties remain consistent throughout the process. Finally, the system is designed with safety in mind. The etch chamber is kept at constant pressures to ensure that no hazardous materials can be introduced into the unit, and all moving parts have safety shut offs to ensure that no parts can be damaged due to human error. Overall, MARCH FlexTRAK is an ideal RF asher/ etcher machine for precision etching projects. It combines the latest etching technology with very precise controls, user friendly software, and superior safety features. It is also highly versatile and able to handle complex processes with ease.