Used MARCH FlexTRAK #9210328 for sale

MARCH FlexTRAK is an etcher / asher equipment specifically designed for maximizing the efficiency of the wafer etching and ashing process. The system is a fully automated solution that offers low etch loading time, fast process scheduling, and excellent recipe consistency. It is ideal for production and research and development applications. The unit is based on an advanced pressure-controlled variable power architecture that provides superior chuck stability and recipe repeatability. This ensures consistent etch and ash profiles, and reduces time to yield results. The machine's automated process scheduling feature also allows quick generation of a suitable etch configuration for any specific application. FlexTRAK boasts a compact design that is easy to install and requires minimal training for operation. The tool consists of two chambers - an etch chamber and an ashing chamber - that are connected to two automated robots. These robots are responsible for transferring the wafers between the chambers, and for loading and unloading the wafers into the etch chamber. MARCH FlexTRAK is equipped with an advanced process controller. This controller features an intuitive 8.4 inch color touchscreen for easy operation. The box also houses a high-throughput optical imaging asset that accurately monitors the etch and ash process. FlexTRAK has a unique loading model that can load up to 25 wafers in its etch chamber. The equipment's loadlock automatically carriers and locks the wafers of interest into place for precise and repeatable results. MARCH FlexTRAK also offers a wide range of memory and recipe setting capabilities. This allows users to save all etch and ash configurations for easy access and repeatability. These settings are stored in an easily accessible memory library, making it easy to generate the exact etching and ashing settings for desired applications. In conclusion, FlexTRAK is an advanced etching and ashing system that offers superior chuck stability and excellent recipe consistency. It is easy to install, requires minimal training, and is capable of processing up to 25 wafers in a single run. The unit also provides a host of convenient features, including an intuitive touchscreen, fast processing scheduling, and automated recipe archiving.