Used MARCH INSTRUMENTS Plasmod #9236960 for sale

ID: 9236960
Etcher ENI ACG 5XL RF Generator.
MARCH INSTRUMENTS Plasmod is a fully automated etcher/asher ideal for integration within your process. It offers high-quality etching and ashing by way of its state-of-the-art plasma technology. The entire equipment is enclosed within a sealed unit, eliminating the need for additional safety measures. It is simple to operate and features a touch-screen user-friendly interface for convenience. Plasmod is incredibly versatile and includes multiple configurations for optimal process operations. The etcher provides high-resolution etching for a variety of materials including amorphous and poly-silicon. This versatility enables creation of intricate patterns and structures for all sorts of applications. The asher offers a rapid ashing cycle to quickly remove residual films of carbon and photoresist while preserving all of the underlying particles. The system also includes a process monitoring unit, which records all process settings and parameters. The collected data can then be used to improve the etching or ashing process. Additionally, the remote control machine allows for easy integration into other equipment. Moreover, MARCH INSTRUMENTS Plasmod can be connected to a PC for data transfer and remote process monitoring. The tool is equipped with a built-in gas inlet for the drying, etching, and ashing process, and comes with interchangeable gas lines for convenience. The internal heater ensures proper stabilization of the gas during the process. Moreover, the gas line includes a safety valve to prevent accidents. In addition, Plasmod is designed to minimize contaminant particles with its dedicated filtration asset. The model utilizes a inbuilt high quality differential pumping equipment to extract pollutants and particles away from the etching chamber. This results in extremely clean surface results with minimal particulates, enabling excellent film transfer and improved yields. MARCH INSTRUMENTS Plasmod is an incredibly reliable system built for many years of operation with minimal maintenance requirements. With its easy-to-use touch-screen interface and simple set up, Plasmod is the ideal choice for the etching and ashing process. It offers versatile settings, comprehensive process monitoring, and clean results to facilitate product yields.
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