Used MARCH PM-600 #9118779 for sale

MARCH PM-600 is a self-sufficient plasma etcher/asher ideal for industrial production and scientific/research uses. As a highly effective plasma etching/ashing process, PM-600 is designed for precise, rapid, and safe etching/ashing of both stainless and non-metal substrates. The equipment is equipped with a three-stage vacuum chamber and is driven by a low-speed, direct-drive rotary pump for superior performance. The chamber is provided with an integrated ozone detection system that allows for simple and accurate measurement of residual ozone contamination within the vacuum unit during the etching/ashing process. MARCH PM-600 employs a high-resolution, programmable, and adjustable scanning stage to precisely position the substrate under the RF coils. This allows for fast and accurate etching and ashing of substrates with uniformity and repeatability. The RF energy supplied to the substrate can be precisely controlled through a variable power supply and can be adjusted for different etching/ashing processes. PM-600 features a gas flow control machine that allows for precise flow rate and pressure adjustment of the etching/ashing gases, further allowing for comprehensive control of etching and ashing variables. Additionally, the tool includes a cooling gas circuit to cool the substrate for optimal process repeatability. The asset features a user-friendly graphical user interface and configurable process parameters for maximum flexibility and ease of use. MARCH PM-600 is designed for both industrial and research applications, and can be used in semiconductor, medical, electronics, and other related fields. With its reliable performance and robust construction, PM-600 is the perfect choice for any etching/ashing application.