Used MARCH PX-1000 #142222 for sale

MARCH PX-1000 Etcher/Asher is a modern, advanced dry etching and ashing equipment that leverages plasma power to precisely etch and ashing various materials to a variety of levels and intricacies. The system consists of a base unit, control unit, automatic electrode controller, and quartz etch/ash chamber. MARCH PX 1000 can process wafers and substrates up to 6 inches (150mm) in size. The substrate material compatibility ranges from metals to ceramics, quartz, and glass. PX-1000's advanced control unit is capable of getting repeatable results every time offering various recipes, as well as customizable selections to cover typical large batch etching processes, as well as one-off, research and development style activities. Automatic electrode maintenance is included, with the machine automatically compensating for electrode erosion and wear over time. The DR-1000 is capable of achieving processing times as quick as 10 seconds per wafer at 1016 Torr (134 mBar) and 91 Watts, with added steps to reach optimal endpoint. Gas flows are highly adjustable and consist of up to four process reactor gases and up to three hoses for reagent/etch additives and cleaning gas. The quartz chamber is designed with multiple ultra-low leak, RF-rings along with a radiation shield and an adjustable PTFE showerhead. The chamber is highly adjustable and offers numerous secure mounting opportunities for components providing a great degree of flexibility during processing. PX 1000 offers the highest degree of precision for a plasma etching tool, making it the perfect fit for research and development activities as well as production style processes. MARCH PX-1000 is ideal for a variety of materials including Al, Cu, Cu alloys, Fe, and SiC to name a few. It also offers the flexibility needed for etch/ash applications such as integrated circuitry, compound semiconductor devices, and MEMS devices. MARCH PX 1000 exists as a turnkey etching solution offering exacting repeatability and excellent long term reliability.