Used MARCH PX-1000 #293701620 for sale

MARCH PX-1000 is a high reliability etcher / asher equipment designed for processing large substrates. The system is well suited for production of flat panel displays, solar cells, semiconductors and MEMS devices. The etcher / asher utilizes a vertical plate type chamber for etching and ashing process. This allows for uniform etching and ashing of substrates up to 514mm in size with a high degree of repeatability. The unit is equipped with up to four separate PM modules to provide the necessary flexibility for multiple etch and ash recipes. MARCH PX 1000 offers ultra-low sublimation rate and high etch selectivity for metals, polysilicon, and deposits on silicon. The plasma source for etching and ashing includes a multi-frequency RF generator with power up to 4kW. A turbomolecular pump is used to eliminate the exhaust gas and produced particles necessary for process uniformity and good etch profiles. The chamber has a choice of substrate stage options such as rotational or linear sample handling. A dedicated substrate heater machine is provided to maintain substrate temperature up to a maximum of 250ºC. Substrate heating is available in time based temperature control or as a heated zone profile. The temperature uniformity within the chamber is ±3ºC or better. PX-1000 can also be customized with additional features such as auto-van launch and integrated etch load-lock systems. PX 1000 is constructed using parts and materials with high thermo mechanical stability and is designed for easy installation and maintenance. Options such as O2 and N2 gas introduction and oxygen resistance are also available. This etcher / asher tool is a reliable workhorse for production applications that require uniform and repeatable etching and ashing results.