Used MARCH PX-1000 #293711097 for sale
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MARCH PX-1000 is an advanced etching and ashing equipment designed to handle a wide range of materials, including various semiconductors, ceramics, and other substrates. It provides users with a precise and reliable etching process, capable of creating precise patterns, pits, and trenches, as well as precise ashing processes for materials such as graphite, silicon, and copper. MARCH PX 1000 features an advanced process gas delivery system consisting of micron filter, digital mass flow controllers, and a distribution manifold. This ensures a steady and precise flow of the process gas, resulting in precise etch results. This etching unit also features advanced process control, allowing for precise control of all etching parameters including chamber pressure, RF power, process gas ratio, and other important etching parameters. The machine is equipped with an automated temperature control module, which allows users to perform precise temperature control during etching and ashing processes. This ensures precise control of etching depth and ashing quality, while eliminating heat damage to the material surfaces. Furthermore, the automated shutters can be used to reduce the flow of any airborne particles and improve the quality of the etched surface. PX-1000 also features a high-precision, fully enclosed CO2 laser tool, capable of high-speed, high-precision etching and ashing processes. It can etch with a precision of up to 100nm and can also be used for dry etching and dry ashing processes. Furthermore, it features dual-frequency RF coils, allowing for single-side and double-side etch processes. The advanced laser asset allows users to achieve high-precision and high-throughput results. The model is controlled via a user-friendly touchscreen interface that allows users to quickly set up and control etch and ashing processes. Furthermore, it is equipped with an automated end-point detection equipment, which provides users with a detailed report at the end of the etching or ashing process. This report can be used for further review and analysis of the quality of the etching or ashing process. To further improve safety, PX 1000 etching and ashing system is equipped with an emergency stop button, which automatically stops any etching or ashing process once activated. Furthermore, the entire etcher is provided with an advanced alarm unit that notifies the user when any process parameters deviate from the set values. These features provide improved safety and reliable operation to the machine.
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