Used MARCH PX-1000 #293765898 for sale

MARCH PX-1000
Manufacturer
MARCH
Model
PX-1000
ID: 293765898
Wafer Size: 12"
Plasma asher, 12".
MARCH PX-1000 is a powerful and reliable etcher/asher designed for the precision processing of a wide range of semiconductor materials. It is an advanced etching and ashing equipment capable of withstanding high-temperature and plasma processes. MARCH PX 1000 features a patented double-sided etching and ashing chamber with a capacity up to 8.9 liters. This etching and ashing system provides an extremely accurate etching and ashing resolution of 1.5 μm, making it ideal for the processing of ultra-thin layers. PX-1000 comes equipped with a wide range of adjustable parameters, including temperature, pressure, pressure control, and RF power, to optimize the etch profile and the repeatability of etching and ashing results. Moreover, it features a high-precision temperature control unit with a resolution of 0.1°C, allowing for an accurate temperature control for each application. The machine also features an advanced process control interface to provide consistent and safe operation. Furthermore, PX 1000 offers reliable process safety, thanks to its advanced safety functions. It is equipped with pressure and temperature sensors to ensure safe process, and can be equipped with an inert gas purging tool to protect the fabricated materials from oxygen and other environmental contaminants. Additionally, the asset also features a high-pressure discharge mechanism to precisely control the pressure in the chamber, and a low flow rate of gases to avoid drying under-etching. The high-performance MARCH PX-1000 offers great value for money. It is compact and lightweight, and can be easily integrated into any production model. Moreover, the equipment is highly accurate and repeatable, providing consistent and reliable results for multiple applications. Thus, MARCH PX 1000 achieves high-end precision etching and ashing results suitable for most production environments.
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