Used MARCH PX-1000 #293777657 for sale
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MARCH PX-1000 is an advanced etcher/asher designed to accommodate the needs of both bench-top research and high-volume production users. It is equipped with a highly accurate and sophisticated plasma control equipment to provide optimal control of the plasma etching process. MARCH PX 1000 is capable of high throughput and is equipped with both independent electrodes and a multi-zone platen capable of accommodating multiple substrates and sizes at a single time. Additionally, PX-1000 offers excellent repeatability, providing exact identical plasma etching results. PX 1000 features a digital gas valve which can be preset to control the percentage of gas concentration and pressure of the gas being used in the process. This allows for precise control of the parameters such as flow rate, pressure, temperature, and humidity of the etching process. MARCH PX-1000 also provides flexibility and excellent process yield by having an external ionization source and pulse mode capabilities to provide additional control over the etching process. MARCH PX 1000 is further equipped with an automated wafer handling robot enables integration with the etching system for automatic loading and unloading of wafers for etching. This allows for the maximum process throughput and capability for PX-1000. Additionally, PX 1000 features a closed-loop feedback unit with plasma monitoring and automatic shutoff when desired criteria is met, as well as an exhaust machine which helps keep the environment clean and safe. MARCH PX-1000 also features an intuitive user interface based on a Windows-style graphical user interface and a wide range of diagnostic functions which can aid in troubleshooting and the optimization of the etching process. Additionally, MARCH PX 1000 can be easily connected to a local PC in order to store, retrieve and manage the etching process data and parameters. In summary, PX-1000 provides excellent accuracy and control of the plasma etching process, with a flexibility that accommodates both research and production needs. The automated wafer loading and unloading, extensive diagnostic capabilities, intuitive graphical user interface, and closed-loop feedback tool make PX 1000 a perfect choice for all of your etching needs.
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