Used MARCH PX-500 #9176784 for sale

MARCH PX-500 is a highly advanced etcher / asher specialized for processing large areas with high precision. Thanks to its powerful laser equipment, this system is capable of precision patterning with high throughput. This unit adopts a laser diode with a pulse width and pulse repetition frequency of 10 μs and 50 kHz, respectively, and can provide variable laser power settings. It also possesses a highly efficient heating machine and a multi-zone temperature controller. This makes it possible to regulate the speed of etching/ashing processes, allowing for improved process reproducibility. MARCH PX 500 features a large processing area of 500 x 500 mm, and provides very uniform etch depth. It also has high resolution of 5 μm at 1/8 step settings. This tool supports a wide range of materials, including Si, glass, metals, ITO, diamond, and other common substrates. It is equally applicable for both RIE and ICP processes. Furthermore, its large loading tray and automated handling systems make it highly efficient in mass production. PX-500 comes with the latest PX software package, providing a graphical user-friendly interface and powerful pattern editing capabilities. It also supports various data input interfaces, such as GDSII and CAD, for which it allows direct and easy reading and editing. For more complex processes, the automatic parameter optimization (APO) technology is available. PX 500 is driven by an Intel Core i5 processor, offering a high degree of computation speed. In addition, MARCH PX-500 is equipped with various user-friendly safety features, such as a chamber-integrated laser safety shutter and eye protection. For better accessibility, the asset is designed with a nitrogen enclosure, and handy diagnostic tools such as profiler and reflectance measurements. Moreover, after-sales support provided by the company ensures quick and accurate response. All in all, MARCH PX 500 etcher / asher is a highly advanced, user-friendly model that is suitable for high-precision patterning of large areas. It is an ideal choice for processes requiring high throughput and low materials loss rates.