Used MARCH Super Plasmod #9089873 for sale

MARCH Super Plasmod is an etcher and asher that is designed to offer accurate and precise etching and ashing for a wide range of applications. It is an all-in-one etching and ashing equipment, able to deliver rapid cycle time, an expandable workplace, and a wide variety of process recipes. Super Plasmod's spacious quartz hot-zone guarantees consistent process results with a temperature control accuracy to within 2°C. It also features a variable-frequency plasma generator, allowing users to easily adjust the plasma frequency as fit for the application. MARCH Super Plasmod's Dual Gas Delivery system delivers a variety of precursor gases and inert gases with control of gas pressure, total gas flow, reaction gas flow and gas balance for each chemical etching process flow. The unit also uses specially designed shower heads to provide uniform precursor delivery on the target substrate. The machine also features a built-in process monitor, which records the total gas pressure, total gas flow and substrate bias voltage, helping users to obtain the best etching results. Super Plasmod is also equipped with a full-sized viewport for monitoring etching and ashing processes, as well as a dual vacuum tool to reduce contamination. It also has an automated cleaning asset to ensure that etch chambers are never exposed to outside power. MARCH Super Plasmod features multiple safety mechanisms, including a motion detector, closed-loop water recirculation model, and emergency shut-off switch. Additionally, the equipment has a variety of user-friendly features such as step-by-step operating instructions and multi-language operation. To ensure that users get consistent results every time, Super Plasmod has adjustable parameter dividers, allowing users to input and save different parameters for different recipes. MARCH Super Plasmod is an advanced etching and ashing system that is ideal for both industrial and academic applications. It features precise, accurate control of all parameters necessary for etching and ashing processes, and is equipped with advanced safety features and user-friendly design features.