Used MATRIX 303 #9396142 for sale

MATRIX 303 is a fully automated etcher / asher built by Oxford Instruments. It is designed to enable rapid etching for a wide range of photoresist and films used in emerging technologies, such as nano-scale fabrication. As a result it has become a highly sought after tool in research laboratories around the globe. 303 is composed of several components. It includes an integrated vacuum cassette station, automated control equipment and cleaning station as well as a Direct-Write lithography tool, which is the heart of the system. This tool uses an x-y stage to move a photo mask or photomask over the substrate, enabling feature sizes down to 20 nm to be etched both quickly and accurately. The unit is equipped with a high-end imaging unit, which allows for extremely accurate image alignment, which is critical in nano fabrication. The unit also incorporates a mask alignment machine, which ensures that the photomask is placed accurately before exposure. The stainless steel cassette station integrated into MATRIX 303 allows substrate holders to be loaded quickly and easily into the machine, eliminating the need for manual loading and unloading of wafers and enabling fast etch rates. The automated control tool enables users to set specific parameters such as etch time and pressure as well as monitor the progress of the etching process. In addition, the advanced cleaning asset built into 303 ensures good etching performance. The two-step cleaning process helps to eliminate residues caused by the etching process and protect the equipment and prevent contamination of the substrate. MATRIX 303 is a high performance, reliable tool suitable for high-end research laboratories and small- to medium-scale production. Its advanced features, solid construction and easy operation make it a great choice for users who need to etch with high accuracy and speed.