Used MATRIX 403 #14205 for sale
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ID: 14205
Etchers
200-240 Volts 50/60Hz 1 Phase
Temperature controlled chuck
Cassette loading
Capable of 4" to 6" wafers
Down Stream isotropic etcher for oxide, poly or nitride films
ENI OEM 6 13.56 MHz RF generator
BROOKS AUTOMATION 6100-36 handler
ENI OEM-6M-11781 generator.
MATRIX 403 etcher / asher is an advanced, multi-functional dry etching tool that is designed for the advanced production industries. It features a number of unique features, such as advanced software and hardware tools, that allow operators to control their production needs and provide the highest level of efficiency. 403 is an automated etcher / asher that is designed to provide both dry etch processing and ashing. It features a single chamber system with a 0.8mm thermal boundary layer of protection, allowing uniform etching and ashing temperatures of up to 1000°C. This advanced design allows for maximum etchant uniformity, making it ideal for highly detailed etched patterns in multiple substrates, such materials as SiO2, SiN, and SiSiC. MATRIX 403 is designed for maximum versatility, with built-in software and hardware tools for complete control. The software allows for complex etching and ashing processes, such as isotropic etching, directional etching, and process optimization. Pre-defined programs can be easily implemented for full control over the etching and ashing parameters. The hardware components, such as the chamber, source, and target, are designed with touchscreens and easily replaceable components to maximize productivity and reduce risk of contamination. The sophisticated interface and control panel of 403 provide a complete, user-friendly experience. The user can easily access process related information and parameters, making it easy to monitor the process and quickly adjust settings. The system also features standard monitoring and feedback that allows for quick and efficient troubleshooting, optimizing process times and improving overall efficiency. For maximum safety, MATRIX 403 comes with a number of emergency shutdown and venting options, as well as a high pressure seal for the chamber recovery. The etching and ashing system also offers flexible scheduling and alarms, allowing for automatic operations and detect any malfunctioning parts. 403 is a great addition to any production floor and is suitable for a wide range of materials and substrates. Its advanced design, safety features, powerful tools, and user-friendly interface allow operators to quickly and effectively meet their production needs with the highest efficiency and safety standards.
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