Used MATRIX 403 #9250129 for sale

MATRIX 403
Manufacturer
MATRIX
Model
403
ID: 9250129
Wafer Size: 6"
Vintage: 1992
Oxide etchers, 6" 1992 vintage.
MATRIX 403 is a high-precision etcher/asher designed for micro/nano electronic fabrication. This all-in-one lithography system is ideal for producing ultra-fine features and patterns with high resolution and repeatability. It is capable of performing direct write, lift off, positive/negative resist patterning, multi-layer processing, sputter coating, and oxide etching for producing precision patterns on substrates. 403 has a flexibly designed pattern generator that is able to generate any repairable line/space pattern. It also includes a dedicated precision motion control system for precision etching and ashing to ensure high accuracy and repeatability. It is equipped with a range of compatible sensors and controllers such as variable speed motor drivers, XY table, and micron resolution displacement sensor to measure the displacement of the workpiece for precise etching or ashing. MATRIX 403 is an independent, accurate etcher/asher that uses advanced, user defined can sequences and is highly efficient with dry etching of dielectrics, metal, and polymers. It is equipped with a computer-controlled XY stage for precise positioning and etching of patterns on the workpiece. The computer-controlled stage combined with software makes it easy to achieve ultra-fine features with repeatable accuracy. 403 is also capable of integrating with other processes, including photoresist spinners, coating systems, hydrogen plasma systems, and post etch baking systems, to form a complete solution for your etching needs. It has a powerful user interface, compact design, and relatively low cost of ownership. Its customizable functionality allows users to further fine-tune the etching and ashing process for complex structures. In summary, MATRIX 403 is a robust, precision etcher/asher that is designed to quickly and accurately produce ultra-fine features and patterns on substrates. It is equipped with a powerful pattern generator, precise motion control system, and easy-to-use computer-controlled XY stage, and it is able to integrate with other processes for even more versatile patterning capabilities. With its user-friendly, low-cost design, 403 is an ideal choice for micro/nano electronic fabrication.
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