Used MATRIX Jaguar 300MM #9220309 for sale

MATRIX Jaguar 300MM Etcher/Asher is a state of the art etching and ashing equipment specifically designed for the etching and ashing of large scale substrates such as wafers and patterned substrates. The system is capable of producing etches down to a minimum of 0.6 um and providing uniformally etched surfaces across a range of large substrates between 5 inches and 300 millimeters in size. The unit offers a variety of etch chemistries including nitric, hydrofluoric, phosphoric, sulfuric, and many more. Jaguar 300MM utilizes advanced etching techniques such as reactive ion etching, electron cyclotron resonance, and plasma etching, allowing the user to tailor the etching process for optimal speed, quality, and locality. MATRIX Jaguar 300MM is comprised of different subsystems including the Cassette-Stage, Gas Box, Air and Pump Utilities, Chamber, and an advanced Control Machine. The Cassette-Stage allows the user to quickly and accurately position large substrates in the etch chamber for processing, and is comprised of a leveler mechanism, a cassette handle, and a vacuum chuck tool. The Gas Box asset provides metered nozzles for the introduction of etch chemistries into the chamber, and the various valves and controllers allow for precision accuracy when reacting gases and etch chemistries. The Air and Pump Utilities of the model provide inert and non-inert atmospheres into the chamber, and consists of an air-jet-cooled turbomolecular roughing pump, a titanium-driven rotary pump, and several other components. The Chamber equipment is a custom designed environment optimized for etching and ashing processes, and is composed of an electron cyclotron resonance generator, an electrostatic chuck for anti-radar and alignment purposes, and a gas distribution manifold. The advanced Control System integrates all the subsystems and provides the user with real-time data acquisition of the etching process and allows for optimization of the process parameters. Jaguar 300MM Etcher/Asher is capable of high-throughput etching and ashing with excellent locality and process control. The unit is designed to provide excellent etch profiles and uniformity across the substrate, with superior performance compared to other etchant systems. The incorporation of advanced technology such as the Cassette-Stage, Gas Box, and advanced Control Machine, provides the user with a powerful and flexible platform to reliably and accurately control etching and ashing processes. The utilization of MATRIX Jaguar 300MM Etcher/Asher provides the users with a state of the art tool for etching and ashing of large-scale substrates.