Used MATRIX System 10 #9245773 for sale
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ID: 9245773
Plasma asher
(2) Transport modules
(2) Process module models 1108 (DAIHEN Microwave asher)
Spare parts
Missing interface board for PC.
MATRIX Equipment 10 is an etcher or asher designed specifically for the laboratory/research environment. It is capable of etching on both flat and curved surfaces and producing high resolution results with our patented planarization technique. With its patented planarization, System 10 can etch even very small features with absolute precision. It is also able to cover very large surfaces with excellent accuracy, with its power to reach up to a 4' x 4' working area. MATRIX Unit 10 is designed with a computer interface, capable of direct connection to a host computer. The machine offers automatic control of the parameters for each process: voltage, current, time and temperature, ensuring the best possible performance for each job at hand. The powerful Machine Control Module (MCM) also provides a remote control of the process parameters, automatic data acquisition and visualization of the real-time process. The user has full control of all the parameters in real time, and can save and recall any experiments for later reprogramming.Tool 10 comes with a wide range of accessories, such as anterooms, etching masks, vacuum fixtures, plasma manifolds, etc. It is also equipped with an extensive range of safety features, such as overvoltage and overcurrent protection, as well as an environmental safety monitoring asset. By using a single power supply and master switch, the risks of fire are significantly reduced. Additionally, all components and working tools are designed to reduce the risks of contamination or cross-contamination. In terms of etching results, MATRIX Model 10 provides excellent profile fidelity, clean-up and etch rate uniformity, as well as flexibility to use a wide range of etchant chemistries. Additionally, unmatched user convenience and performance has been achieved with the easy to use interface and the ability to setup and monitor the process remotely. Finally, the equipment is designed to ensure maximum environmental safety with features to reduce contamination and pollutants, and an energy efficient design for maximum performance and efficiency of operation and resources.
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