Used MATRIX System One 105 #9293401 for sale

Name: MATRIX System One 105
Brand: MATRIX
SKU: 9293401
Availability: InStock

URL successfully copied!

Etchers / Ashers

Manufacturer

MATRIX

Model

System One 105

ID: 9293401

Wafer Size: 4"-6"

Vintage: 1991

Asher, 4"-6" Si and GaAs, Square substrates, 4.5" RF 100 - 500 V Auto-tune Maximum watts: 600 W, 13.56 MHz Special chuck: 70 mm - 150 mm Special chuck wafers: 50 mm Adjustable cassette platform TYLAN Butterfly valve Capacitance manometer Temperature control: Wafer chuck Closed loop Resistive element heated Perimeter Draw pump ring grooved Chuck: 150°C - 250°C, (+5°C) Descum: 70°C -150°C, (+5°C) At > 250 W Plasma chamber: Side shooter gas inlet Electrode design: Meshed electrodes Clamped dual quartz baffle design Base plate cooling Throughput: >35 WPH Process gases: O2 and N2 (MFC Optional) Strip rate, 6" Baked resist: 1.2µ 120°C > 1.2 µ/min at 250° C Repeatability ±10% Non-uniformity 1 Sigma: < 5% Particulates added: <0.10 cm² Size: >0.2 mm Descum: +10%, 1 Sigma Minimum vacuum pump speed: 32 CFM Reliability: Availability: > 95% MTBF: > 450 Hours MTBA: > 24 Hours MTTR: < 4 hours No wafer cooling station 1991 vintage.

Read More Close

MATRIX Equipment One 105 is an etcher/asher designed for metal finishing, hard and soft material, surface preparation, marking, etching and labeling. It works as a precision machine that provides a wide range of applications. The integrated controller uses a B&R PLC2 controls, which provide reliable, accurate and fast operation as well as a wide variety of functions. This ensures that the etcher/asher operates smoothly with very little maintenance required. The stand-alone controller operates the unit itself and can be monitored via an included PC interface. This makes it easy to program and setup the system, allowing for batch processing and repeat runs. The unit is capable of etching/ashering all materials with a wide range of thicknesses. It can process both soft and hard materials, such as stainless steel, aluminium, brass, plastics, glass, and other composites. The machine's horizontal working surface enables users to process sheets of material up to 1000mm x 800mm in size. The cross beam allows up to five tools to be changed quickly and is motorised for easy adjustment during projects. The unit has a range of features which make it simple for users to set up and operate. It features onboard memory self-diagnostic alarms, which alert users of errors, allowing them to take corrective action quickly. It also comes with safety guards which make sure that materials being processed and the operator are safe. The whole tool is VDE/GS- and DIN-compliant for safety. The unit employs a combination of UV and IR diode laser systems, enabling it to achieve high precision results with a high material utilisation rate. The UV laser source allows users to process plastics, while the IR laser-asset allows users to process metals and glass. There are six work-head positions allowing simultaneous and swift processing. The multiple pool patterns of the target material simplify processing and achieve an even surface finish. The model is built with a low-maintenance design, allowing for safe and efficient operations with minimal downtime. MATRIX Equipment One is a powerful etcher/asher that can provide fast turnaround times and high quality end results. This makes it ideal for use in a variety of manufacturing and engineering applications, providing convenience, speed and accuracy.