Used MATTSON Aspen II #293633237 for sale
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ID: 293633237
Wafer Size: 8"
Dual ICP systems, 8"
Cassette door cylinder, 18"
ICP Dual chamber with cooling chamber
(4) Quartz tubes
(4) RF Coils
(4) Channels gas lines per chamber with MFC
(4) AO Boards
(4) Matching boxes
(2) Heater blocks
(2) Slit doors
(2) Gas boxes
(2) DI/O Boards
(2) Process chambers
(2) RF Generators (Comet cito plus)
2-Lift pins
Pressure controller: (2) ACX, (2) Throttle valves
Robot
Shuttle
Arm
Platform
Cassette door
O-Ring and ISO valve
CPU Board
AI Board
Indexer boar
SECS II Board
PIB
Motor control board
Analog filter board
Terminal panel
Operator interface: Y (SMIF Type).
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