Used MATTSON Aspen II #293775105 for sale

MATTSON Aspen II is an advanced etcher/asher used in the fabrication of semiconductor devices and integrated circuits. The equipment is highly configurable, and is capable of supporting etching, ashing, and other related processes. The core of the system is comprised of a 4-axis motion control unit, which includes a high-speed stage with a motion platform to ensure precise movement of the wafers over the entire working area. Additionally, a finely calibrated linear encoder-resolver machine sits atop the motion platform, providing a detailed view of the wafer surface to ensure precise patterning. Aspen II features a state-of-the-art etching and ashing chamber for processing. It utilizes a gas delivery tool for targeted, precise delivery of the desired etching or ashing gases. It also features a high-precision wafer positioning asset, ensuring accurate alignment. It also contains a high-quality beam scanner with superior accuracy and stability, and a multi-channel capacitive sensor for determining the wafer position. MATTSON Aspen II features a robust user interface, designed to be intuitive and easy to use. Experienced as well as novice users will appreciate the ease of use and comprehensive control options. The rich control interface allows adjustments to process parameters, such as temperature, time, gas flow, pressure, etc., to be easily adjusted during the process. Aspen II can be used with a variety of etch and ashing recipes, which are stored in the model's library and can be quickly accessed. This allows users to quickly select, load and modify recipes, as well as access recipe notes, parameters and logs. In short, MATTSON Aspen II is an advanced etcher/asher, designed to deliver precise and repeatable processing. Its combination of sophisticated motion control, high-quality etching and ashing chambers, and detailed control features make it ideal for the fabrication of integrated circuits and semiconductor devices.