Used MATTSON Aspen II #9246107 for sale
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ID: 9246107
Wafer Size: 8"
ICP Asher, 8"
Dual chamber system
Upgraded gas panel
Quartz ware
Chamber side and back:
Front end:
26" With separate operator interface
4-Color light tower
TFT Design monitor
Load locks:
Single L/L
(2) Cassette stations
Capability of queuing lots
Load lock seal: Lip seal (Non bellow)
Platform: 4 x 25 Slot cassette
Rotating cassette nests, 8"
Cool down station without circular groove pattern
Transfer robot:
Main robot: MATTSON 3-Axis robot
Robot arm: 4-Adjustable paddles standard
Slit door
Process module configuration:
Electrode configuration: Electrical heater with backing plate
Tube type: Quartz tube
Standard process window
ICP Chamber O-Ring type: Fluorosilicone
Temperature controller: WATLOW EZ Zone
Grids / Guide rings: Extended guide rings
Pressure controller:
VAT Valve Pressure controller
Chamber manometer: 10 Torr
Load lock manometer: 100 Torr
Shuttle manometer: 1000 Torr
RF/ MW System:
RF System: Top RF, 13.56 MHz
RF Generators
RF Top match: TRAZER 914-92003-00 (TRAZAR AMU 10D-2)
Gas system:
Chamber peripherals and gas line option: (4) Gas configuration back and side chambers
Gas 1: O2 - 5000 sccm
Gas 2: CF4 - 100 sccm
Gas 3: N2 - 1000 sccm
Gas 4: N2/H2 (4%) - 1000 sccm
MFC 1 to 4: BROOKS GF Series
Endpoint detection system: MATTSON Endpoint system with fixed filters
Cable length RF / Signal / Power: 19ft.
MATTSON Aspen II is a multi-functional etcher/asher system designed to provide precision etching/ashing functionality. Aspen II offers a series of advanced capabilities, which make it the ideal solution for a variety of precision etching/ashing processes. Key features of MATTSON Aspen II include a robust build designed to provide durability and consistent performance, monochromatic resolution of up to 0.1 um, process control with a full-color touchscreen interface, and a range of onboard memory options for storing process configurations and recipes. This results in a highly reliable and user-friendly etcher/asher. Aspen II is designed for ease of use and is equipped with several features to ensure accurate, repeatable performance. Its highly sensitive Z-axis height-sensing contact ensures the tip of the etched parts contacts the substrate evenly and accurately. This results in excellent etch quality that is highly reliable and consistently repeatable. Additionally, it is equipped with "surface tracking" technology that can detect changes in the etching surface height, enabling MATTSON Aspen II to automatically adjust the depth of etching or ashing accordingly. This results in a consistent and even result every time. Aspen II is equipped with a range of components to ensure precise and repeatable results when etching on metal parts. These include an integrated 9-position auto-indexing tool changer, auto alignment of the substrate, anodizing recipes for selective anodizing, multiple-contact stoppers for substrate edge detection, and on-screen parameters for process control. All these features ensure a uniform and accurate finish every time, regardless of the metal used. MATTSON Aspen II is designed for easy integration into automated processes. Its highly stable, low maintenance 5000V/4000W DC source ensures repeatable and reliable performance, and it can be integrated into virtually any automated process. Additionally, it features a range of proprietary software and firmware that is designed to make process control and monitoring more efficient, accurate, and repeatable. Aspen II is the ideal solution for anyone seeking a reliable, repeatable, and easy-to-use etcher/asher solution. Its advanced capabilities and highly reliable and consistent performance make it the ideal solution for a variety of precision etching/ashing applications. MATTSON Aspen II's range of software and hardware-based features ensure consistently excellent etching results every time, and its robust build and automated process control capabilities make it an ideal solution for industrial users looking for reliable results and simplified operation.
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