Used MATTSON Aspen III Lite #9390391 for sale

MATTSON Aspen III Lite is an all-in-one single waveform etcher/asher for integrated semiconductor wafer device processing. It is a compact, cost-effective solution designed to meet the needs of research and development (R&D) semiconductor device fabrication and research. The precision of its single-waveform technology is capable of producing precise etching and ashing features in a small footprint, providing excellent resolution and accuracy. Aspen III Lite is built with a stable, uniform ultra violet light source which is capable of generating a minimum line width of 50nm with precise depth control. It is capable of supporting a wide variety of mask types including chrome, polysilicon and nitride. The equipment is equipped with a submicron, quartz-based, non-contact, reflectionless monitor for precise process data acquisition and monitoring. Data can be accurately extracted in real-time in addition to being stored in the machine for later analysis. MATTSON Aspen III Lite is equipped with electro-mechanical components that help reduce drift and maintain precision over its entire range of thermal processing. This includes a high temperature excimer lamp power supply, a closed-loop temperature control system, and a capacitance drive etching unit. It has aluminum transfer into the process chamber, making it suitable for wafer sizes from 3" to 8". Aspen III Lite supports multiple etching/ashing processes, including VLE (vacuum level etch), iSLE (in-situ locally etched), Wet Ash, PECVD (plasma-enhanced chemical vapor deposition), and ECR (electron cyclotron resonance). It is equipped with a large-area wafer processing capability that is integrated into a custom designed chamber. It can support up to five (5) processes simultaneously, and up to five (5) recipe recipes can be stored in the memory. Safety is ensured at all stages of the process with the use of alarms and interlocks to shut down operations if a fault occurs. In addition, MATTSON Aspen III Lite is protected from external interference with galvanic isolation transformers for the signal lines between the VME bus and driver control. This ensures the onboard communication and control systems remain intact and operates in ideal condition. The machine is easy to operate with intuitive operator interfaces, and offers a comprehensive range of support services for installation, application, and maintenance. MATTSON also provides software tools for data logging and wafer traceability, allowing users to have total control over their etching/ashing processes.