Used MATTSON Aspen #293774634 for sale
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ID: 293774634
Wafer Size: 8"
Vintage: 1999
System, 8"
Process: PR Asher
MATTSON Standard dual arm robot
Back chamber: RISSHI EXH-1004 Chiller
Utility box: PCW Distribution
Chamber position:
Back chamber: ICP Asher
Side chamber: ICP Asher
Back and side chamber:
Process: PR Asher
Tube material: Quartz
ADVANCED ENERGYE RFPP 30S RF Generator
TRAZAR AMU-10D-3 RF Matcher
CMLB-11506 Pressure guage
MDV018 Throttle valve
ACX120103 Throttle valve controller
PARTLOW MIC 2000 Temperature controller
Gas box:
Gas-1: O2, 5000 SCCM
Gas-2: O2, 200 SCCM
Gas-3: CF4, 300 SCCM
Gas-4: H2/N2, 3000 SCCM
Transformer: 200 VAC - 100 VAC
1999 vintage.
MATTSON Aspen is a leading manufacturer of etch and ash equipment used in the semiconductor industry. Founded in 1988, MATTSON has established a strong reputation for producing advanced, reliable, and high-performance etching and ashing tools that meet the demanding requirements of the semiconductor manufacturing process. Aspen series of etchers and ashers are designed to provide precise and uniform etching and ashing processes essential in the fabrication of advanced semiconductor devices. These tools are utilized in semiconductor fabrication facilities to remove material selectively from the surface of wafers during the manufacturing process. MATTSON Aspen series offers a range of etching and ashing solutions tailored to various processing needs and applications. These tools are known for their versatility, accuracy, and efficiency in processing various materials, including silicon, silicon dioxide, metal films, and dielectrics. One key feature of Aspen series is its advanced process control capabilities. These tools are equipped with advanced monitoring and control systems that ensure precise process parameters, such as etch rate, selectivity, uniformity, and endpoint detection. This enables semiconductor manufacturers to achieve high process repeatability and yield, critical factors in achieving consistent device performance. MATTSON Aspen etchers and ashers are also designed with a focus on productivity and flexibility. These tools are engineered to deliver high throughput and fast processing speeds, enabling semiconductor manufacturers to meet tight production schedules and maximize wafer output. Additionally, the tools offer a modular design that allows for easy customization and upgrades to adapt to changing process requirements. In terms of technology, Aspen series incorporates advanced plasma etching and ashing techniques to achieve precise and controlled material removal. These tools utilize a range of plasma sources, including inductively coupled plasma (ICP), capacitively coupled plasma (CCP), and reactive ion etching (RIE), to etch and ash materials with high selectivity and uniformity. MATTSON Aspen tools also feature innovative chamber designs and gas delivery systems that optimize process uniformity and enhance etch and ash performance. The tools are equipped with RF power supplies, gas flow controllers, temperature control systems, and endpoint detection sensors to ensure accurate process control and reliable results. Furthermore, Aspen series is supported by a comprehensive service and support network, including maintenance, training, and application support to help customers optimize tool performance and maximize operational efficiency. MATTSON team of experienced engineers and technical specialists work closely with customers to address their specific process challenges and ensure the successful implementation of the tools. Overall, MATTSON Aspen series of etchers and ashers are innovative, reliable, and high-performance tools that play a crucial role in enabling semiconductor manufacturers to achieve high-quality device fabrication and meet the demands of the fast-evolving semiconductor industry. With a strong focus on advanced process control, productivity, and technology innovation, Aspen tools are well-suited for semiconductor fabrication facilities striving for excellence in semiconductor device manufacturing.
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