Used MATTSON Suprema IM #9241281 for sale

MATTSON Suprema IM is an automated, plasma-based wet etching and ashing equipment designed for the processing of substrates up to 200 mm. It is ideal for semiconductor, thin film, and MEMS device fabrication and processes silicon, GaAs, polyimide, and other etched substrates. The versatile platform provides users the ability to etch and ashing in a single tool with substrate sizes up to 200 mm. Suprema IM is an advanced etching system incorporating high-purity gas delivery, precise plasma control, and temperature control for advanced process operations. It utilizes the Conac™ conductive etching first chemistries and processes a wide range of materials such as silicon-based substrates to metals and dielectric materials, all in a single tool. The etching feature in MATTSON Suprema IM provides a low-temperature operation which helps minimize contamination and allows for multiple etch steps while maintaining substrate quality. In addition to etching, Suprema IM also features a plasma-based ashing process. It offers a controlled-volatility plasma ash process which produces high level of ash selectivity in a single process. This process utilizes remote plasmas or inductively coupled plasma (ICP) to deliver low-temperature ash removal of dielectric residue films. The acidic chemistries in the unit provide a superior level of cleanliness to the processed materials. MATTSON Suprema IM is configurable with its comprehensive turn-key packages and features various user settings for each of the processing chamber for optimum repeatability. It also offers Windows/Mac-based user interfaces where users can control various functions such as process recipes, connection to data systems, and remote machine access. Utilizing its database feature, users can store and recall recipes, and save parameter settings for faster process execution. To ensure effective maintenance and troubleshooting, Suprema IM offers a predictive maintenance platform, which is an integrated platform that monitors the machine and alerts users to any problems or potential issues. The tool is also designed with a high-level of safety features which reduce operator exposure to hazardous materials during operation. Overall, MATTSON Suprema IM is an advanced and versatile wet etching and ashing tool suitable for a wide range of application in semiconductor, thin film, and MEMS device fabrication. It features a highly configurable user platform, an automated database, predict maintenance, and advanced safety features for improved productivity and yield.