Used MATTSON Suprema IM #9262053 for sale

MATTSON Suprema IM
Manufacturer
MATTSON
Model
Suprema IM
ID: 9262053
Wafer Size: 12"
Vintage: 2011
System, 12" 2011 vintage.
MATTSON Suprema IM is an advanced etcher/ asher that is ideal for critical and complex semiconductor device fabrication. It features superior performance, advanced process control, cost-effectiveness and great scalability. This etcher/ asher has been designed to provide maximum process control and repeatability with low using costs. This advanced etcher/ asher offers highly competitive process throughput, product quality and process scalability. Suprema IM has high resolution imaging with a minimum feature size of 0.25µm and minimum line width of 0.2µm. It also features field-programmable gate arrays (FPGAs), allowing the etcher/ asher to evolve and adapt to future applications. MATTSON Suprema IM has a wide range of etchers and gas processes, including reactive ion etching (RIE), isotropic etching, chemical vapor etching (CVAE) and deep reactive ion etching (DRIE). This etcher/ asher has high specification multiple gas control options, high resolution imaging, and ultra-precise matching. It has an enhanced flexibility and scalability that enables the etcher/ asher to be used in a wide variety of process modules, ranging from clean room to abatement environments. Suprema IM has a unique chamber design allowing for easy loading and unloading of the wafers from the etcher/ asher, resulting in shorter process times and reduced risk of accidental contamination. Moreover, this etcher/asher has advanced software to ensure uniform etching and process control. MATTSON Suprema IM provides superior process control accuracy, with repeatable and reproducible results for a wide range of applications. It offers the flexibility to simultaneously etch multiple materials, including metals, oxides, nitrides, and silicides, with minimum use of resources. This advanced etcher/ asher is suitable for applications in high-end memory, logic, microprocessor, and optoelectronics devices. Suprema IM is cost-effective, providing maximum efficiency in process control and device fabrication. The use of this etcher/ asher reduces downtime and provides flexibility for users when conducting complex processeso. The combination of high performance, flexibility, and scalability makes MATTSON Suprema IM an ideal solution for advanced semiconductor device fabrication.
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