Used MATTSON Suprema #182681 for sale
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ID: 182681
Wafer Size: 12"
Vintage: 2010
Resist ashing system, 12"
PM1: Double Wafer Ashing
PM2: Double Wafer Ashing
2008 vintage.
MATTSON Suprema is an etcher / asher a device which is used to create high-resolution structures, circuits, and patterns onto a variety of surfaces. It is widely used in engineering, device fabrication, circuitry, and other micro-surface treatments. This machine offers comprehensive features and a wide range of compatible materials and substrates to work with. Suprema has an array of compatible etching options for the various materials and processes. It includes a total of six external mounting options, including laser, Helium Neon laser, carbon dioxide laser, Ion beam, and ArF laser, as well as reactive-ion etching and reactive-ion milling. These processes can be used to etch both ferrous and non-ferrous materials, depending on the application. It has a parallelized processing architecture with a minimal thermal budget to ensure longer service life of the etcher. MATTSON Suprema has a comprehensive system of radio frequency shielding enabling users to work with a range of high-frequency components. The gasses and other materials used during the process are precisely controlled using a range of environmental sensors and multi-point processing architecture. The built-in automated detection system allows for remote monitoring and data logging of the process. Using the unique Suprema RF source, it is possible to etch patterns and shapes onto conductive surfaces with any kind of feature size, orientation and control. The source of the process can be configured for optimized etch depth, depth control and time, for the best possible results. The various options and features of the machine make it ideal for use in laboratory or production-level environments. It is intended to be easy to use and maintain, with a minimal training and knowledge requirement. The software interface is designed to be intuitive, while the interior illumination system ensures visibility of the etched surfaces during operation. MATTSON Suprema is an advanced solution in terms of accuracy, precision and repeatability. It is a reliable and efficient etcher / asher that is tailored to meet a wide range of needs and preferences.
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