Used MAXIS 300L #9216760 for sale

MAXIS 300L is an advanced thermal etcher and asher designed for fabrication of high-resolution micro components. It is a mature platform that provides a wide range of capabilities for material deposition, etching, and ashing. MAXIS 300 L features a robust, automated equipment with a custom-designed gas inlet and gas distribution system. It is designed to provide uniform gas flow for consistent etching and ashing with minimal residual contamination. The unit is able to handle a wide range of gases, substrates, and application pressures. 300L features an advanced reactive-ion etching (RIE) module with a flexible gas flow configuration. The RIE module supports various etching chemistries including wet-etching, ICP-etching, FIB-etching, and PECVD-etching. The RIE module is enclosed in a hermetically sealed chamber and is equipped with a high-precision atomizer, a precise gas injection machine, and a digital signal processing tool. This ensures tight control of etching parameters such as power and flow rate to achieve uniform etching and enhanced pattern definition. 300 L also features a flexible substrate loading and handling asset. This model supports a wide range of substrates including glass, quartz, and ceramic materials. It is equipped with a high-resolution moving stage that ensures precision during substrate loading and alignment. The equipment has high temperature, low pressure cooling capabilities to prevent overheating during processing. MAXIS 300L also includes an advanced ashing system with a high-level containment enclosure. This supports both wet and plasma ashing processes. It is capable of handling a wide range of materials with high processing temperatures, pressures, and chemistries. The advanced automation unit ensures fast and consistent ashing processes. MAXIS 300 L is compatible with various imaging and metrology systems for monitoring of designed features and in-process testing. The machine has in-depth diagnostics capabilities to enable precise customization and optimization for various applications. Additional features include customizable gas management and software-controlled automatic gas shutoff. 300L is an ideal platform for fabrication and modification of high-resolution micro components. It provides robust performance, flexible process control, and reliable operation.