Used MAXIS 300LA #293591993 for sale

MAXIS 300LA
Manufacturer
MAXIS
Model
300LA
ID: 293591993
Wafer Size: 12"
Vintage: 2012
ICP Etchers, 12" 2012 vintage.
MAXIS 300LA is a high-performance plasma etching machine capable of processing a wide range of materials in the microelectronics, biomedical and microelectromechanical systems (MEMS) industries. It features a large, 300mm diameter etching chamber; allows fast, high-precision process editing with ease; and offers flexible workflow management software to enable operator control and data analysis. The machine has an integrated turbine-based vacuum system, with a pressure range spanning from 1 x 10-3 to 5 x 10-3 mbar. This enables etching of substrates with various chamber settings, up to a maximum temperature of 400°C for high etch rate applications. In addition, it allows for fast approaches, with process initiation times of less than 3 minutes. 300LA's high-precision processing capabilities are further enabled by a table of etching recipes, automated with laser-powered depth-sensing and real-time feature recognition. Using this system, the operator is able to track feature recognition, alignment, recipe selection and fast post-processing sequences. MAXIS 300LA also offers rapid cooling after etching, with cool down times of less than 3 minutes. This cooling system also allows fast wafer processing following etching, with an average time of less than 3 minutes. The machine also features advanced models to simulate thermal, etch and stress effects on the part, enabling versamtication to optimize process parameters. 300LA is designed to ensure efficient operation and QA/QC compliance. In addition to features such as parameter lock, post-process data tracking and statistical process control, the machine also offers diagnostic and feedback features, helping to maintain process repeatability, as well as process tracking and traceability. MAXIS 300LA also allows for fully automated operation, making it ideal for high production environments with limited operators. 300LA is a powerful, high-performance etcher/asher, providing a host of features and advantages that make it suitable for a wide range of applications. It is an ideal choice for those looking for high-precision processing, quick results, and low process down times.
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