Used MAXIS 300LA #293636259 for sale

MAXIS 300LA
Manufacturer
MAXIS
Model
300LA
ID: 293636259
Wafer Size: 12"
ICP Etchers, 12".
MAXIS 300LA etcher / asher is an advanced and reliable etcher / asher used in the semiconductor industry. 300LA is designed to provide industry-leading process cycles, allowing users to achieve sub-micron etch and ashing requirements. It is capable of etching and ashing with superior precision and repeatability. MAXIS 300LA features an advanced chemical chamber, which is made of stainless steel and features an integrated heating element for precise temperature control. This eliminates external gas tanks and provides a sealed chamber for maximum process stability. The integrated heating element is suitable for a range of temperatures up to 500°C. 300LA also features an integrated vacuum pumping equipment and a pressure control system. The vacuum unit is capable of reaching vacuum levels of 10-9 torr. The pressure control machine is very accurate, allowing precise control of the pressure during the etching and ashing process. This ensures exceptional repeatability of the process. In addition to the chamber, MAXIS 300LA provides a set of four optional cassette tool carriers. These carriers are designed to hold a variety of wafers and substrates. 300LA is also equipped with user-selectable programming options, allowing precise control of the degrees of rotations, power levels, reaction times, and more. MAXIS 300LA etcher / asher is capable of delivering reliable and consistent results. With its advanced technology and robust design, it offers an ideal solution for users requiring precise etching and ashing for their semiconductor applications.
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