Used MAXIS 300LA #9205489 for sale

MAXIS 300LA
Manufacturer
MAXIS
Model
300LA
ID: 9205489
Wafer Size: 2"-6"
Vintage: 2011
ICP Etchers, 2"-6" 2011 vintage.
MAXIS 300LA is an etcher/asher designed for high quality and throughput performance. It offers superior etching and ashing characteristics for a broad range of materials including polyimide, silicones, and other tough materials. 300LA is designed to meet the highest standards in etching, ashing, and cleaning. The equipment features a 10-300 watts adjustable power for deep etching, precise ashing, and ultra-high cleaning. The user-friendly design and intuitive operation allow extremely fast and accurate etching and ashing on various substrates. MAXIS 300LA employs advanced technologies for superior connection of the pad and substrate, while still offering precision etching and ashing. It features a wall-mounted cabinet design providing easy access to all parts and components. This allows for quick replacement and maintenance of parts when necessary. The high-clarity, full-color display allows operators to easily monitor the process. It is also equipped with an advanced fluid examination and control system, which helps to ensure excellent etching and ashing quality. 300LA employs two-stage pyrolytic heating unit to guarantee uniform temperature distribution across the chamber. This allows for high etching and ashing uniformity. The machine also has a variety of etch and ashing gas flow selection capability, allowing for flexibility in etching and ashing different materials. Finally, it is equipped with an easy-to-use program editor, which allows for quick and user-friendly programming of etching and ashing parameters. In terms of safety, MAXIS 300LA is equipped with a back door interlock and a safety switch to ensure user safety during operation. It also comes with an auto-fail safe mechanism, which protects the tool from mishandling and misuse. 300LA is designed to guarantee user safety and reliable operation. Overall, MAXIS 300LA is an optimal choice for high quality and fast throughput performance of etching and ashing. The advanced technologies guarantee superior etching and ashing results, while offering intuitive operation and user safety features.
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