Used MAXIS 300LA #9402510 for sale
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MAXIS 300LA is a high performance etcher / asher suitable for many types of research, laboratory and industrial applications. It offers unsurpassed performance, speed and accuracy in etching, ashing and decoating tasks. It is designed for a wide range of applications, from shallow etched channels to deep etching of wafers. It uses two parallel plasmas, operating with two different RF frequencies, to ensure a homogeneous etching depth. The etch depth is accurately controlled by 300LA software, which also allows it to work with a variety of substrates, such as silicon, semiconductors, glasses and metals. It also enables rapid cycling of etch and ashing parameters, offering high productivity while keeping a very low cost of ownership. MAXIS 300LA is made of robust, reliable components, ensuring safe and uninterrupted operation. It features a patented plasma source with a 300mm wafer etching capacity and a 200mm wafer ashing capacity. It also has a long life vacuum pump which ensures low operating cost. It has versatile and user-friendly software options, including recipes, macros and pulse options. This allows it to meet the demands of the most sophisticated application demands. 300LA also comes with several accessories, such as a step motor interface, a substrate heater and a species mass spectrometer interface. MAXIS 300LA is a robust etching and ashing system designed for extensive use. Its high performance capabilities, combined with its cost of ownership benefits, give this tool a place in the most demanding applications. Its user-friendly software options and accessories make it an ideal choice for research groups, laboratories and industrial etching applications.
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