Used MEMSSTAR ORBIS Alpha #293657883 for sale
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MEMSSTAR ORBIS Alpha is an advanced etcher and asher designed to tackle a wide range of surface treatment applications. This versatile etcher is capable of handling a wide range of substrates including metals, ceramics, composites, plastics, and a variety of other materials. The system offers two independent process chambers with a total of 11 process gases: air, oxygen, nitrogen, hydrogen, argon, xenon, krypton, helium, carbon monoxide, sulfur hexafluoride, and sulfur trioxide, enabling systematic changes in etching rates. ORBIS Alpha is equipped with an advanced quad-zone process chamber, which offers capabilities for single-sided and double-sided processes. This allows for the efficient and effective patterning of substrates across four separate surface areas in a single process with the ability to blanket etch & asher, as well as selectivity etch within a single chamber. The unique and efficient design of MEMSSTAR ORBIS Alpha enables it to provide industry-leading performance and flexibility. With the ability to carry out low SAD and SOG surface treatments, it can provide accurate profile and etch rate control while controlling undercut and relative surface roughness. This enables it to achieve surface treatments with high-aspect ratio openings and line widths down to 1 micron on metal and ceramic substrates. ORBIS Alpha's advanced temperature-controlled etching and ashing enables precise control of process parameters and repeatability of results across successive batches. Its unique combination of high-power microwave, high-frequency and high-pressure process gases provides superior etching and deposition results. MEMSSTAR ORBIS Alpha also incorporates a high-sensitivity thermal sensor allowing precise adjustment of process parameters and sophisticated safety systems to protect substrates from accidental overheating. Additionally, the system has a wide range of integrated peripheral devices such as cassette loaders, parts screener and particle deflectors that facilitate reliable, repeatable and robust surface treatments. Overall, ORBIS Alpha is an advanced, flexible and versatile etcher and asher that offers superior analytical performance and repeatability. With its easy-to-use operation and its comprehensive safety systems, the system is the ideal choice for many applications in the MEMS, semiconductor, and optical industries.
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