Used MIMASU MSE 4000 FAL #293796068 for sale

Manufacturer
MIMASU
Model
MSE 4000 FAL
ID: 293796068
Vintage: 2008
Etchers 2008 vintage.
MIMASU MSE 4000 FAL is a highly advanced etcher/asher equipment designed for semiconductor manufacturing and research applications. This state-of-the-art tool offers precise control and repeatability in the etching and ashing processes, making it an essential tool for creating microstructures in semiconductor devices. MSE 4000 FAL features a sophisticated plasma processing chamber that utilizes a combination of gases and RF power to etch and ash materials with high precision. The system is equipped with multiple gas injection ports, allowing users to introduce a variety of gases for different types of etching processes. This flexibility makes MIMASU MSE 4000 FAL suitable for a wide range of applications, from plasma etching of silicon dioxide to plasma ashing of photoresist. One of the key features of MSE 4000 FAL is its advanced RF power supply, which enables precise control over the plasma parameters. The unit offers adjustable RF power levels, frequency settings, and pulse modes, allowing users to tailor the plasma characteristics to suit their specific processing requirements. This level of control is essential for achieving uniform etching and ashing results across large substrate surfaces. In addition to its precise plasma control capabilities, MIMASU MSE 4000 FAL also features a high-speed substrate handling machine for efficient processing of wafers. The tool is equipped with a robotic arm that can quickly transfer substrates in and out of the processing chamber, minimizing cycle times and increasing throughput. The substrate handling asset is designed to accommodate different wafer sizes, making MSE 4000 FAL versatile and adaptable to various production needs. MIMASU MSE 4000 FAL is equipped with a comprehensive software interface that allows users to set up and monitor the etching/ashing processes with ease. The intuitive user interface provides real-time data on processing parameters, chamber pressure, gas flow rates, and RF power levels, giving operators full control over the model operation. The software also includes recipe management functionality, allowing users to save and recall process recipes for consistent results. Another notable feature of MSE 4000 FAL is its advanced endpoint detection equipment, which monitors the plasma emission signals during processing to accurately determine the endpoint of etching/ashing. This technology ensures that the process stops at the desired depth, preventing over-etching or under-etching of the material. The endpoint detection system contributes to the overall accuracy and reliability of MIMASU MSE 4000 FAL in achieving precise etching results. Overall, MSE 4000 FAL is a cutting-edge etcher/asher unit that offers unparalleled precision, control, and efficiency in semiconductor processing. With its advanced plasma processing chamber, RF power supply, substrate handling machine, and software interface, MIMASU MSE 4000 FAL is a versatile tool for creating complex microstructures in semiconductor devices. Its advanced features and capabilities make it a valuable asset for semiconductor manufacturers and research facilities seeking to achieve high-quality etching and ashing results.
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