Used MKS 660-072823-R200 #9164994 for sale

MKS 660-072823-R200
Manufacturer
MKS
Model
660-072823-R200
ID: 9164994
RF Plasma generators For LAM Flex DS etcher.
MKS 660-072823-R200 is a multi-functional etcher and asher that is capable of providing exceptional performance in a wide range of etching, ashing, and cleaning applications. This equipment features a 330 mm x 300 mm x605 mm single chamber platen chamber with a capacity of thirteen liters. The chamber is constructed from stainless steel and designed to provide excellent resistance to corrosion and corrosion-related damage. The platen is also corrosion-resistant, having been manufactured with a special high-performance annealing process. These features combine to create a superior etching and ashing experience. The system also features a vacuum source and control capable of reaching a full range of temperatures and pressures. This is used to draw out platen fumes, and optimally vaporize the etching and ashing materials, respectively. 660-072823-R200 also includes several advanced operating capabilities. This includes the ability to adjust pulse oven parameters to achieve the desired etching, ashing, and cleaning precisely. The user interface also allows for full control over the unit's parameters, allowing for adjustments to be made to precisely control the temperature, pressure and duration of processing. In addition to the machine's exceptional etching and ashing capabilities, MKS 660-072823-R200 also features a variety of safety systems. This includes a glycol and water-cooled exterior to prevent over-heating, anti-bump bounces to protect the platen and chamber from any high-temperature exposures, and a special high-pressure valve to control pressure and temperature fluctuations. The safety systems are designed to provide the user with peace of mind in their operation of the tool. 660-072823-R200 is a top-tier etcher and asher and provides the user with reliable performance for a wide range of etching, ashing and cleaning processes. Its massive chamber capacity, advanced pulse oven controls and sophisticated safety systems make it an excellent choice for precise and reliable etching, ashing, and cleaning processes.
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