Used MODULAR PROCESS TECHNOLOGY / MPTC UV-600 #9386602 for sale

MODULAR PROCESS TECHNOLOGY / MPTC UV-600 is an etcher/asher designed to fulfill demanding process requirements for advanced MEMS, silicon and III-V device manufacturing. This etcher/asher is designed with a modular approach that facilitates easy customization and integration into the specific needs of a particular application. MPTC UV-600 is capable of extremely precise etching and ashing of materials down to a 70nm minimum linewidth. The modular design of MODULAR PROCESS TECHNOLOGY UV-600 allows for customizable flexibility throughout many etching applications. It features a process chamber that can accommodate a variety of wafers sizes up to 6-inch, and customizable process recipes can be stored and recalled using up to 108 recipe steps. It is also equipped with state-of-the-art safety and diagnostic features. UV-600 features the patented Molecular Cascade Source (MCS) technology from MPTC. This technology provides the etcher/asher with an innovative, plasma source that is extremely stable and highly repeatable. The MCS technology uses low-cost consumables, is maintenance free, and provides a 10X reduction of consumption of rare gases. The benefits of the MCS technology translates to cost reduction and improved process capability. MODULAR PROCESS TECHNOLOGY / MPTC UV-600 also features an impressive etching/ashing capability utilizing 20 different etching gas species. It is capable of performing a variety of etching and ashing regimes including oxygen-based species, C4F6, Ar, SF6, and NF3. The etching procedure can be optimized for each application by setting the process parameters such as gas flow rate, power, etching time, etc. Unique etching chamber designs are available on niche markets such as Deep Reactive Ion Etching (DRIE), and highly repeatable processing. MPTC UV-600 has an intuitive user interface that provides convenience to skilled engineers as well as novice users. It features a real-time temperature and pressure monitoring system, displayed in an integrated LCD display. The machine is also equipped with fail-safe systems that help to ensure safety and longer equipment life. To summarize, MODULAR PROCESS TECHNOLOGY UV-600 is an etcher/asher that is designed to provide highly precise, repeatable, and customizable etching and ashing capabilities. It is equipped with a wide rangeof etching gas species, a modular design that allows for easy customization, and an intuitive user interface that provides assurance to skilled and novice users alike. Its patented MCS technology, combined with its real-time temperature and pressure monitoring system makes it a formidable resource for reliable and cost-efficient etching and ashing of a variety of materials.