Used MODUTEK SPS 620 #9176760 for sale

MODUTEK SPS 620 is an etcher / asher that delivers a high level of precision performance and reliability, making it the ideal equipment for various etching and ashing applications. This highly advanced etcher / asher features a 19-inch touch screen, allowing users to easily access its powerful yet user-friendly software. The system also features an advanced Vactronic Control Unit, providing users with the most precise chamber temperature control available. SPS 620 has a dual-chamber design, which allows users to perform both etching and ashing processes without having to move the sample from one chamber to the other. This machine also provides simultaneous operation of etching and ashing, eliminating the need for manual operation. The internal wafer carry tool allows for precise wafer positioning, with a positional accuracy of ±2.5 μm. The tool also features a 10 x 10 chamber that can handle up to 8-inch wafers and can etch substrates up to 10 μm thick. MODUTEK SPS 620 is designed with an industrial-grade hardware and components, making it one of the most reliable and durable etching and ashing systems available. Its robust design allows for a maximum process temperature of up to 500°C, while the patented, double-wall etching chamber design helps to provide an excellent level of thermal protection and precise temperature control. This asset also features a fully automated wafer handling model, as well as an internal E-beam evaporator and an integrated gas mixing equipment for precise etching and ashing. SPS 620 is designed with safety in mind, featuring an emergency stop button, as well as over-temperature and over-pressure protection. Additionally, its open architecture design with RS 232/485, Ethernet, and USB communication ports makes it easily integrated into existing laboratory systems. Combining advanced features, precise performance, and reliable quality, MODUTEK SPS 620 is truly an excellent choice for any etching or ashing applications.