Used MORY V-1500X #9132178 for sale
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MORY V-1500X is a state-of-the-art etcher/asher designed for high-performance semiconductor manufacturing. This device uses a "cold etching" process to achieve greater precision and accuracy in the etching/ashing of substrates, such as wafers, chips, interposers, and more. This etcher comes with a multi-stage, high-resolution vacuum chamber that ensures optimal performance during the ashing process. This chamber maintains a stable environment with its active humidity control to eliminate potential contaminants. The source of the etching/ashing chemicals is provided by a pulsed-plasma torch enclosed in a protective housing. The torch creates a plasma plume, which is delivered to the substrate wafer via a gas nozzle integrated with a fan-shaped shower plate. This shower plate helps to uniformly distribute the plume over the entire surface of the wafer. This process is enabled by a wide range of customizable parameters, including pressure, gas flow, pulse length, semiconductor energy, and wafer rotation speed. The etcher is equipped with a high-resolution, high-accuracy optical imaging equipment as well. This system facilitates the monitoring of the etching/ashing process in real-time, allowing for greater precision and control. It is also used to inspect the surface of the substrate to ensure its uniformity and accuracy prior to the ashing process. In terms of safety, V-1500X has been designed to operate within strict industrial standards. Its wafer monitoring unit is fitted with a triple-redundant unit that provides accurate indications of any hazards or events that may occur during etching/ashing. The device also has an automatic failover function that allows it to safely stop the process in the event of a problem. Finally, MORY V-1500X features a simple user interface, allowing for easy customization of parameters and quick troubleshooting. This etcher/asher also comes with several additional features, such as intelligent cooling machine, remote monitoring, and an in-built performance tool that allow for even better process control and monitoring.
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