Used MTJ P291 / P334 #9285840 for sale

MTJ P291 / P334 is a high-performance etching and ashing machine designed to provide extremely precise microelectronic etching, ashing, and micromachining on substrates up to 10" (25 cm) in diameter. It is a compact, self-contained equipment that is easy to use and is ideal for universities, laboratories, and semiconductor and electronic manufacturing processes. P291 / P334 is a dedicated etching and ashing system capable of etching and ashing as shallow as 1 µm. The machine employs a micron-level precision etch/ash transfer unit with an automated load-lock machine designed to optimize productivity and ensure consistent high-quality etching and ashing. The machine features advanced process control systems that can handle different chemical processes and substrate materials, allowing the user to select the optimal etching parameters for each process. This includes the ability to program recipe settings for post process metrology and other process functions. MTJ P291 / P334 is configurable to run a variety of etching chemistries- including KOH, TMAH, MUF, and SF6, and also features an integrated gas cabinet which allows for both Ar/O2 and XeF2 flows. Other features of P291 / P334 include an adjustable loaders and an advanced motion tool for faster and more accurate placement and translation of substrates. Additionally, the machine features an integrated vacuum asset, allowing for higher throughput and improved substrate handling. The model also has two side cooling compressors, two integrated temperature controllers, and a multichannel signal processor with automated parameter tuning for the best etch performance. Finally, MTJ P291 / P334 is equipped with a patented independent door mechanism, allowing for thermal insulation when the door is opened. The isolated door prevents cross-contamination and thermal shock issues during etching and ashing processes. In addition, the equipment also incorporates advanced safety features such as pressure sensors, emergency shut-off, and an intuituve human-machine interface (HMI) for easy operation and monitoring.