Used NANOPLAS DSB 6000 #293747090 for sale

NANOPLAS DSB 6000 is an etcher/asher designed for precise, delicate 1-sided fine patterning processes in the Semiconductor, MEMS, and LED industries. Designed for precision, the device has high dynamic accuracy of 0.25um line width and 5nm repeat size. It is equipped with a patented DC optical equipment developed by NANOPLAS with precise positioning of the waveform blade and support base. The robust, maintenance-free system features a 6"x6" fixed, nonrotatable work substrate platform that offers as much as 200mm x 100mm of active process area, allowing it to process large-stage substrates. It is capable of etching various materials, such as silicon, quartz, semiconductor alloys, and sapphire. DSB 6000 is designed for process flexibility and robustness. It has a Fiber-Coupled Direct-Diode Laser (diode laser array) with a 3-layer top heater with a 50um continuous temperature homogenization layer and 500 nm depth of the top heated area layer underneath. The etcher/asher also has a x-y-z motor stage, advanced auto-stacking, 4-mask alignment unit, auto/manual motion control and auto focus control for easy operation. The device is equipped with a pulse deposition laser with a 40kHz max repetition rate, adjustable pulse energy and velocity per pre-structured profile and custom film temperature control machine. The user-friendly design has an ergonomic handle which enables easy operation, the LCD display provides real-time information, and NANOPLAS DSB 6000 has embedded powerful diagnostic and diagnostic control algorithms, making the tool easy to use and maintain. To make the asset even easier, the device includes a computer software package for easy setup and operation, an automatic substrate loading model to enable quick turnover of the asher, a PLC (programmable logic controller) for easy programming, and an intuitive human-machine interface for easy setup and operation. DSB 6000 is a state-of-the-art etcher/asher ideal for use in production environments with precise 1-sided fine patterning processes. It is a reliable and accurate device, easy to use and operate, and will ensure that delicate patterning processes are accomplished with precision.