Used NAURA / AKRION / NORTH MICROELECTRONICS ELEDE 330 #293660507 for sale
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NAURA / AKRION / NORTH MICROELECTRONICS ELEDE 330 is an advanced etcher/asher equipment designed for precision etching and ashing applications. The system consists of two parts, elevator and platen with motorized drive. The elevator lifts the wafers to the upper portion of the unit which travels at 10mm/sec, and the platen is driven by a high-precision motorized drive with a resolution of 0.2um. The total machine footprint is only 420 x 400 mm, making it ideal for high-mix, low-volume production. NAURA ELEDE 330 features a user friendly, graphic touch screen interface, enabling efficient programming and process monitoring for complex processes. The tool is able to support multiple gas recipes, allowing users to easily switch between etch and ashing processes as well as various gas mixes from a single machine control. The network interconnection capability allows for integration into third party systems, providing seamless connection and process feedback data. AKRION ELEDE 330 also boasts an Ion Source Assembly (ISA) that provides superior etching and ashing performance for all types of substrates. The inert metal chamber is designed to minimize arcing and plasma leakage, enabling uniform etching of any material. The plasma source can be further tuned and optimized using frequency and voltage adjustment to modify the electron and particle configuration in order to fine-tune the etching process. Additionally, ELEDE 330 features a self-contained gas delivery asset with built-in mass flow controllers, allowing for precise process control during etching and ashing. The model also includes source energization monitors and digital RF capacitance control, ensuring extremely stable etching conditions. NORTH MICROELECTRONICS ELEDE 330 is backed by NAURA excellent after-sales support services and warranty offerings, thus providing a reliable and robust solution for demanding etch and ashing applications.
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