Used NEMS NEMST-JET- 2008III #9247042 for sale
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NEMS NEMST-JET- 2008III is a multifunctional etcher/ascher designed to offer highly precise etching and ashing processes for various substrate surfaces. NEMST-JET- 2008III employs vacuum technology and DSA technology to produce a wide range of images, which may be custom or topographically matched. NEMS NEMST-JET- 2008III is characterized by its reliable and proven performance, providing clean process results with maximum repeatability and reproducibility. It is also powered by a sophisticated control system that offers fast automatic parameter setting and combined with a user friendly graphic interface which allows quick and easy manual adjustments. NEMST-JET- 2008III enables users to control all etching and ashing parameters including, process pressure, chamber temperature, gas flows and process duration. In addition, the precise mechanical design of NEMS NEMST-JET- 2008III makes it possible to fine-tune the process and select different recipes for a wide range of materials. Etching and ashing processes on NEMST-JET- 2008III are performed using a remote RF plasma, which can be tuned to the optimal frequency. This directs the gas flow precisely and uniform within the chamber, thus eliminating non-uniform area heights. Furthermore, the process gas can be optimized according to material type, allowing high quality etching and ashing processes. NEMS NEMST-JET- 2008III features a large 21 inch diameter chamber, allowing for large substrate loading inside the chamber. The cylindrical chamber design allows efficient evacuation of reactive gases and the suspension of substrate holders for processing with simultaneous good temperature uniformity. Finally, NEMST-JET- 2008III offers users a fast, precise and reliable etching and ashing process. A wide range of parameters can be individually adjusted to obtain perfect etching and ashing results. The use of RF plasma also makes the results independent of substrates. Furthermore, the user interface and process control make setting up, running, and monitoring a process on NEMS NEMST-JET- 2008III fast and intuitive.
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