Used NEXSO NSC7000 #9153448 for sale
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ID: 9153448
PECVD Systems
Electric power: 208VAC/100A
Air: 75±5 Psig 3/8"
PCWS/PCWR: 4 l/m (Max Flow), 4Kg/cm2, 3/8"
Exhaust: 60 CFM
Cassette chamber: Sensor
Loadlock chamber: Robot (Brooks PRI-MTR5)
Process chamber: RF power TC heater (6061T6 Aluminum) shower head
Vacuum line: Dry pump gate valve throttle valve B
Gas line: MFC Air valve gas monitor gas cabinet gas bombe filter.
NEXSO NSC7000 is an advanced etching and ashing process equipment used for a variety of electronics applications. It allows for the precise application of chemicals in order to perform etching or ashing processes on surfaces with extreme precision. The system is fully automated, featuring advanced in-situ resistive level measurement as well as automated control of the process parameters. The etching and ashing parameters can be internally programmed from a web interface, allowing users to configure their own settings to best suit their specific needs. The unit also features full machine monitoring, allowing for remote monitoring of the entire tool parameters and activity. NSC7000 can be used for all types of etching and ashing processes, including photo etching, laser patterning, and deep reactive ion etching (DRIE). The asset allows for the application of different chemicals on a variety of substrates such as wafers, silicon, and gallium. NEXSO NSC7000 includes several key components, including a platable tank, electrolyte for chemical deposition and a vacuum/back pressure chamber for etching and ashing process. NSC7000 provides users with the flexibility to use different etching and ashing processes for a wide range of electronics applications. This includes the etching of semiconductors, PCBs, thick-film circuits and magnetic coils, as well as the ashing of lithography resists, alumina, glass and other oxidation-resistant materials. The model features multiple process gases, including hydrogen chloride, chlorine trifluoride, and fluorinated hydrocarbons. The equipment is designed to ensure the highest levels of safety and reliability during etching, ashing and chemical application processes. It features a chemically inert titanium tank, preventing chemical degradation, and a temperature-monitoring system which ensures process parameters remain within safe operating temperatures. NEXSO NSC7000 is an advanced process unit that allows for the safe and reliable application of chemicals for the etching and ashing processes of a variety of substrates and materials. With its flexible and user-friendly programmable interface, the machine provides users with the necessary tools to safely and accurately achieve their desired results.
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