Used NEXTRAL NE 100 #293828894 for sale

NEXTRAL NE 100
Manufacturer
NEXTRAL
Model
NE 100
ID: 293828894
Etcher Mask: Resist, SiO2, Si3N4, Metal Wafer Holder, 4" HF Generator: 300 W at 1356 MHz Gas Lines: SF6, CHF3, O2 Temperature range: 5°C to 40°C End point detector: Laser interferometry (670 nm).
NEXTRAL NE 100 is a cutting-edge etcher/asher equipment designed for advanced semiconductor manufacturing processes. This highly sophisticated tool utilizes a combination of plasma and chemical processes to effectively remove contamination, residues, and oxides from the surface of substrates such as wafers, to ensure optimal device performance and reliability. NE 100 is engineered with state-of-the-art technology to deliver precise and uniform etching/ashing results, making it an essential tool for semiconductor fabrication facilities requiring high-performance and consistent processing capabilities. NEXTRAL NE 100 features a versatile chamber design that accommodates a wide range of wafer sizes, from small-scale research and development samples to full-scale production wafers. The system is equipped with multiple gas injection ports and a sophisticated gas delivery unit that enables precise control of the process chemistry, temperature, and pressure within the chamber. This allows users to tailor the etching/ashing process parameters to achieve the desired results for specific applications, ensuring maximum process flexibility and repeatability. One of the key highlights of NE 100 is its advanced plasma generation machine, which utilizes a high-frequency RF (radio frequency) power source to create a highly reactive plasma discharge within the chamber. This plasma effectively breaks down the chemical bonds of contaminants and residues on the wafer surface, facilitating their removal through a combination of physical sputtering and chemical reaction mechanisms. The tool's plasma source is engineered for high stability and efficiency, ensuring consistent plasma density and uniformity across the entire wafer surface, leading to precise etching/ashing results with minimal variation. In addition to its robust plasma generation capabilities, NEXTRAL NE 100 incorporates a cutting-edge gas flow control asset that enables the precise introduction and mixing of multiple process gases within the chamber. This feature allows users to create custom process chemistries tailored to specific applications, resulting in enhanced process flexibility and control. The model's gas flow control equipment also ensures efficient gas utilization and distribution, minimizing gas consumption and maximizing process efficiency. NE 100 is equipped with advanced temperature control and monitoring systems that regulate the wafer temperature during the etching/ashing process. This precise temperature control is essential for achieving consistent and uniform processing results, as temperature variations can affect the etch rate, selectivity, and uniformity of the process. The system's temperature control unit is designed to maintain a stable and uniform wafer temperature throughout the entire process, ensuring optimal process performance and reproducibility. Furthermore, NEXTRAL NE 100 features a user-friendly interface and intuitive software control machine that streamlines operation and monitoring tasks for the end-users. The tool's software allows for easy programming of process recipes, real-time monitoring of key process parameters, and data logging for process optimization and quality control purposes. Additionally, the asset is equipped with advanced safety features and diagnostics tools to ensure reliable and safe operation in semiconductor manufacturing environments. In conclusion, NE 100 is a cutting-edge etcher/asher model that offers advanced capabilities for precision semiconductor manufacturing processes. With its state-of-the-art plasma generation, gas flow control, temperature regulation, and user-friendly interface, NEXTRAL NE 100 provides semiconductor fabrication facilities with a reliable and high-performance solution for etching and ashing applications.
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