Used NORDSON MARCH AP-1000 #293616503 for sale

The NORDON MARCH NORDSON MARCH AP-1000 is an advanced etcher / asher equipment designed for high throughput and high resolution on a variety of substrates including GaAs, InP, Si, as well as other III-V materials. This system uses a low-pressure reactive ion etching process to enable extremely precise etching of fine line and via layers. NORDSON MARCH AP 1000 leverages multiple technologies, including electron cyclotron resonance etching, direct current etching, and high bias etching to deliver superior etch rates, excellent etch precision, and control of etch shape. AP-1000 architecture includes a dual frequency generator to enable two simultaneous etch processes, including medium-density plasma etching and large-aspect-ratio etching. An advanced wafer motor assembly provides excellent uniformity and repeatability for production. The unit is equipped with a load lock that allows for safe sample loading, as well as a remote plasma source for cleaning the chamber. AP 1000's proprietary control software allows for tailored etching parameters for optimal results. This software interface enables users to program etching recipe parameters such as microwave frequency, bias voltage, and process pressure to achieve optimum performance. Additionally, the machine is equipped with advanced end point detection methods, including time-of-flight mass spectrometry and optical emission spectroscopy, as well as other advanced tools to ensure process sustainability. This versatile tool offers superior performance for a wide range of etching and ashing applications. Etched features can have aspect ratios up to 30:1 and film thicknesses down to 100nm. The precision and accuracy of etch results is among the highest available on the market, providing customers with exceptional results across a wide range of device sizes and geometries. Additionally, the high throughput capabilities of NORDSON MARCH AP-1000 make it an ideal choice for high-volume production.