Used NORDSON MARCH AP-1000 #293753808 for sale

The Normson March NORDSON MARCH AP-1000 is an etching and ashing system used for the production of high purity semiconductor components and industrial products. The system is comprised of two interconnected chambers; a plasma etching chamber and a rapid thermal ashing chamber. The plasma etching chamber uses a high-energy electron beam to generate a uniform thermal plasma environment for etching process. This powerful ion flux aids in the removal of oxide layers and other impurities on the process substrate quickly and precisely, while also minimizing ion damage and collateral surface damage. This chamber has a vacuum rating of 2 mbar and is powered by a 48V DC power supply. The second chamber, the rapid thermal ashing chamber, is a high-temperature furnace that rapidly heats the substrate, using a propane-air mixture, allowing for a swift and efficient thermal decomposition of layer organic contaminants which remain post plasma treatment. The temperature is adjustable from 25C to 1400C and the chamber can reach temperatures above 2000°C. Additionally, this chamber allows for oxygen and nitrogen atmosphere ashing as well as argon ashing for volatile residue removal. In addition, the Normson March NORDSON MARCH AP 1000 features externally openable side-chambers that give users direct access to the substrate cassette for higher throughput; allowing for rapid and easy exchanging of substrates. Dedicated transfer ports allow for external tool access. All of these features create an ideal environment for high performance etching and ashing processes used in industrial and semiconductor production, while offering a safe and efficient user experience. The Normson March AP-1000 makes producing premium products simple and convenient.