Used NORDSON MARCH AP-1000 #293771112 for sale

NORDSON MARCH AP-1000 Plasma Asher is a Plasmatech™ etching equipment provided by NORDSON MARCH and designed for high throughput production of a variety of substrate materials. NORDSON MARCH AP 1000 is a single-chamber system based on a unique plasma-reduced pressure (PRP) chamber, which is equipped with both electron cyclotron resonance (ECR) and inductively coupled plasma (ICP) sources. AP-1000 is capable of etching a wide variety of materials with the highest possible repeatability and ultimate precision. The unit is fully equipped with a host of highly advanced technology, enabling it to process substrates up to 12" (304.8 mm) in diameter, with a maximum aspect ratio of 10:1. AP 1000 is capable of producing an extremely uniform etch depth and feature size of approximately 1µm. The machine also comes with a broad range of features and capabilities including an auto tuning tool, a variable chamber temperature control asset, and a computer navigated via a Windows-based GUI. Additionally, NORDSON MARCH AP-1000 boasts a higher deposition frequency, increasing etch rate, and improved etch uniformity. This is made possible by the use of the high frequency ECR source which has a wider footprint than most other sources. In addition, the model also includes automated calibration for etch recipes and a wide variety of optional accessories such as sample heaters and resist coat masks. NORDSON MARCH AP 1000 is an extremely well-designed and reliable piece of equipment that is ideal for application in both research and high production environments.